Large rectangular gate valve FLAPVAT Series 06.8
High throughput due to short opening and closing times.
- Low holding costs - High throughput due to short opening and closing times - Customer-specified design
- Company:VAT
- Price:Other
1~6 item / All 6 items
High throughput due to short opening and closing times.
- Low holding costs - High throughput due to short opening and closing times - Customer-specified design
Square Gate Valve (Extra Large)
This is a valve compatible with the 10th generation. It has stable performance and has earned the trust of our customers.
Supports large-sized FPD substrates (G11)! A rectangular gate valve that achieves non-sliding for both horizontal transport.
The "Gate valve T-Motion" is a rectangular gate valve that can be configured freely by equipment designers without the constraints of valve size (width × height). Thanks to its unique valve motion, it achieves low vibration without reducing the opening and closing speed. By standardizing components beyond valve sizes, it has become a cost-effective product. 【Features】 ■ Low vibration ■ Low particle generation ■ Low cost ■ Matches various generations ■ Compatible with larger FPD substrates (G11) *For more details, please refer to the PDF document or feel free to contact us.
Design adapted to harsh processes and high temperatures.
- High throughput due to short opening and closing times - Designed for harsh processes and high temperatures - Small distance between the flange faces of the valve
Large square gate valve capable of high-speed operation with lightweight components.
- High operating speed with lightweight components - No system downtime during maintenance - Three different service positions - Safety mode during maintenance
"Single gate valve" and "dual gate valve" are now available in the lineup!
This product is a vacuum gate valve for the process chamber of semiconductor manufacturing equipment. We offer a "single gate valve" that can handle back pressure with a cam-driven mechanism, and a "dual gate valve" that allows for complete horizontal movement without O-ring abrasion. Customization based on customer specifications is also available. 【Features】 〈Dual Gate Valve〉 ■ No O-ring abrasion due to complete horizontal movement ■ Improved maintenance of PM/TM chambers due to independent left and right drive ■ Compact design (same size as single valve) ■ Compatible with an opening of 45×450mm *For more details, please refer to the PDF document or feel free to contact us.